- Author(s):
- ENSSLEN, K; VEPREK, S
- Title:
- DOMINANT REACTION CHANNELS AND THE MECHANISM OF SILANE DECOMPOSITION IN A H2-SI(S)-SIH4 GLOW-DISCHARGE
- Journal title:
- PLASMA CHEMISTRY AND PLASMA PROCESSING
- Year:
- 1987
- Journal volume:
- 7
- Journal issue:
- 2
- Pages contribution:
- 139-153
- BibTeX