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- Author(s):
- IQBAL, Z; CAPEZZUTO, P; BRAUN, M; al., et
- Title:
- STRUCTURAL AND SOME OTHER PROPERTIES OF SILICON DEPOSITED IN AN SICL4-H2 RF DISCHARGE
- Journal title:
- THIN SOLID FILMS
- Year:
- 1982
- Journal volume:
- 87
- Journal issue:
- 1
- Pages contribution:
- 43-51
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