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- Autor(en):
- LI, ZS; WANG, XP; FANG, QF; al., et
- Titel:
- Internal friction and Young's modulus of the nc-TiN/a-Si3N4 films prepared by reactive magnetron sputtering method
- Zeitschriftentitel:
- ACTA METALLURGICA SINICA
- Jahr:
- 2003
- Band / Volume:
- 39
- Heft / Issue:
- 11
- Seitenangaben Beitrag:
- 1193-1196
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