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- Autor(en):
- PATSCHEIDER, J; LI, SZ; VEPREK, S
- Titel:
- Plasma-induced deposition of titanium nitride from TiCl4 in a direct current glow discharge: Control of the chlorine content and gas-phase nucleation
- Zeitschriftentitel:
- PLASMA CHEMISTRY AND PLASMA PROCESSING
- Jahr:
- 1996
- Band / Volume:
- 16
- Heft / Issue:
- 3
- Seitenangaben Beitrag:
- 341-363
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