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- Author(s):
- PATSCHEIDER, J; LI, SZ; VEPREK, S
- Title:
- Plasma-induced deposition of titanium nitride from TiCl4 in a direct current glow discharge: Control of the chlorine content and gas-phase nucleation
- Journal title:
- PLASMA CHEMISTRY AND PLASMA PROCESSING
- Year:
- 1996
- Journal volume:
- 16
- Journal issue:
- 3
- Pages contribution:
- 341-363
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