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Author(s):
PROKOP, J; MERICA, R; GLATZ, F; al., et
Title:
Selective deposition of amorphous germanium on Si with respect to SiO2 by organometallic CVD
Journal title:
JOURNAL OF NON-CRYSTALLINE SOLIDS
Year:
1996
Journal volume:
200
Pages contribution:
1026-1028
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