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- Author(s):
- VEPREK, S; SCHOPPER, K; AMBACHER, O; al., et
- Title:
- MECHANISM OF CLUSTER FORMATION IN A CLEAN SILANE DISCHARGE
- Journal title:
- JOURNAL OF THE ELECTROCHEMICAL SOCIETY
- Year:
- 1993
- Journal volume:
- 140
- Journal issue:
- 7
- Pages contribution:
- 1935-1942
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