Efficient model for predictive MEMS microphone design: Model derivation and experimental verification

Oberndörfer, J.; Schrag, G.; Wachutka, G.

Document type:: Konferenzbeitrag
Contribution type:: Textbeitrag / Aufsatz
Author(s):: Oberndörfer, J.; Schrag, G.; Wachutka, G.
Title:: Efficient model for predictive MEMS microphone design: Model derivation and experimental verification
Book / Congress title:: Proceedings of the EUROSENSORS XXVI
Congress (additional information):: EUROSENSORS 2012, September 9-12, Krakow, Poland
Publisher:: Elsevier
Publisher address:: Amsterdam
Year:: 2012
Reviewed:: ja
Language:: en
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