Login
- Author(s):
- MA, DY; MA, SL; XU, KW; al., et
- Title:
- Effecting of oxygen and chlorine on nano-structured TiN/Si3N4 films hardness
- Journal title:
- MATERIALS LETTERS
- Year:
- 2005
- Journal volume:
- 59
- Journal issue:
- 7
- Pages contribution:
- 838-841
BibTeX
BibTeX