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- Author(s):
- VEPREK, S; HEINTZE, M
- Title:
- THE MECHANISM OF PLASMA-INDUCED DEPOSITION OF AMORPHOUS-SILICON FROM SILANE
- Journal title:
- PLASMA CHEMISTRY AND PLASMA PROCESSING
- Year:
- 1990
- Journal volume:
- 10
- Journal issue:
- 1
- Pages contribution:
- 3-26
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